![15[1]_0015_VMZ高精度影像仪.png](/Public/Uploads/uploadfile/images/20250509/15[1]0015VMZgaojingduyingxiangyi.png)
![15[1]_0004_VMU高端影像仪.png](/Public/Uploads/uploadfile/images/20250510/15[1]0004VMUgaoduanyingxiangyi.png)
![15[1]_0010_CMZ计量型三坐标测量.png](/Public/Uploads/uploadfile/images/20250509/15[1]0010CMZjiliangxingsanzuobiaoceliang.png)
![15[1]_0012_CMU高精度三坐标.png](/Public/Uploads/uploadfile/images/20250509/15[1]0012CMUgaojingdusanzuobiao.png)
![15[1]_0019_Vela-03X桌面式系列.png](/Public/Uploads/uploadfile/images/20250510/15[1]0019Vela03Xzhuomianshixilie.png)
![15[1]_0016_Vela-23X-M高速直线电机系列.png](/Public/Uploads/uploadfile/images/20250510/15[1]0016Vela23XMgaosuzhixiandianjixilie.png)
![15[1]_0017_Vela-23-C自动上下料系列.png](/Public/Uploads/uploadfile/images/20250510/15[1]0017Vela23Czidongshangxialiaoxilie.png)
![15[1]_0020_Vela-23X标准在线系列.png](/Public/Uploads/uploadfile/images/20250510/15[1]0020Vela23Xbiaozhunzaixianxilie.png)
![15[1]_0025_TB1500.png](/Public/Uploads/uploadfile/images/20250509/15[1]0025TB1500.png)
![15[1]_0024_DaVinci-G5.png](/Public/Uploads/uploadfile/images/20250509/15[1]0024DaVinciG5.png)
![15[1]_0021_SPECTOR-M-5500（掩膜测量与检测）.png](/Public/Uploads/uploadfile/images/20250509/15[1]0021SPECTORM5500yanmoceliangyujiance.png)
![15[1]_0023_MT270.png](/Public/Uploads/uploadfile/images/20250509/15[1]0023MT270-785.png)
![15[1]_0015_VMZ高精度影像仪.png](/Public/Uploads/uploadfile/images/20250509/686e4d9014835.png)
![15[1]_0004_VMU高端影像仪.png](/Public/Uploads/uploadfile/images/20250510/686e4d901a139.png)
![15[1]_0010_CMZ计量型三坐标测量.png](/Public/Uploads/uploadfile/images/20250509/686e4de3557af.png)
![15[1]_0012_CMU高精度三坐标.png](/Public/Uploads/uploadfile/images/20250509/686e4de35ada3.png)
![15[1]_0014_CME经济型三坐标.png](/Public/Uploads/uploadfile/images/20250509/686e4de361427.png)
![15[1]_0003_扁线电机定子生产线.png](/Public/Uploads/uploadfile/images/20250509/15[1]0003bianxiandianjidingzishengchanxian.png)
![15[1]_0015_VMZ高精度影像仪.png](/Public/Uploads/uploadfile/images/20250509/686e4d9d92ae1.png)
![15[1]_0004_VMU高端影像仪.png](/Public/Uploads/uploadfile/images/20250510/686e4d9d97915.png)
![15[1]_0010_CMZ计量型三坐标测量.png](/Public/Uploads/uploadfile/images/20250509/686e4e038c914.png)
![15[1]_0012_CMU高精度三坐标.png](/Public/Uploads/uploadfile/images/20250509/686e4e039204b.png)
![15[1]_0014_CME经济型三坐标.png](/Public/Uploads/uploadfile/images/20250509/686e4e0398f2b.png)
方案优势
产品参数
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TZDI-6
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TZDI-4
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平台类型
双台面
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最大曝光尺寸(mm)
630×660
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基板厚度(mm)
0.025 - 6
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最小线宽线距(μm)
6
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量产线宽线距(μm)
12
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线宽精度
±1
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对位精度(μm)
±6
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层间对位精度(μm)
10
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景深(μm)
±150
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单机产能
30 秒/ 面 @20mj/cm²
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自动线产能
30秒/ 片 @20mj/cm²
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推荐应用
IC substrate
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-
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平台类型
单台面
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最大曝光尺寸(mm)
630×510
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基板厚度(mm)
0.025 - 6
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最小线宽线距(μm)
4
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量产线宽线距(μm)
8
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线宽精度
±0.75
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对位精度(μm)
±5
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层间对位精度(μm)
10
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景深(μm)
±200 选配主动聚焦
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单机产能
50 秒/ 面 @20mj/cm²
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自动线产能
——
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推荐应用
ICS、SLP
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